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Figure 10. EDAX -coating (DLC coating). The DLC-coated H13 steel tool attains a maximum surface finish. The experimental study was completed with 3 mm, 7 mm, and 8 mm tools. Figure 11 shows the ...

Thus, most 300-mm semiconductor tools are compliant with the SEMI F47 standard. Ironically, due to improvements in wafer-processing technology of 200-mm equipment and economic forces, the lifespan of ...